Research
Spotlight 2:
Slicing of germanium wafers with wire electrical
discharge machining
Germanium, like many other semiconducting materials,
is extremely brittle and prone to micro cracking as a result
of mechanical stresses from abrasive processes such as boule
grinding and wafer slicing with wire saws. Wire electrical
discharge machining (WEDM) was sucessfully used to slice wafers
of 300 micron thickness without any detectable micro cracks.
Another advantage of WEDM is the fact that thin
EDM wires (100 micron diameter or less) produce a significantly
reduced kerf compared to wire saws. This reduces the amount
of material wasted during the slicing, thereby lowering the
cost per wafer. more>>
Figure 2: Prototype WEDM for slicing semiconductor
wafers (left). Germanium wafer sliced with WEDM (right)
|